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NUCLEATION AND GROWTH OF CVD Si THIN FILMS: AFM, SE AND TEM ANALYSIS

Author(s):
Paulson, W. M.
Hegde, R. I.
Doris, B. B.
Kaushik, V.
Tobin, P. J.
Fitch, J.
McGahan, W. A.
Woollam, J. A.
3 more
Publication title:
Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
355
Pub. Year:
1995
Page(from):
77
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992566 [1558992561]
Language:
English
Call no.:
M23500/355
Type:
Conference Proceedings

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