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A SYNERGISTIC APPROACH TO ENVIRONMENTAL CONCERNS IN LARGE SCALE MOCVD PROCESSES

Author(s):
Thompson, A. G.
Tompa, G. S.
Zawadzki, P. A.
McKee, M.
Beckham, C.
Powers, A.
Gurary, A.
Moy, K.
Schumaker, N. E.
4 more
Publication title:
Materials and processes for environmental protection : symposium held April 5-7, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
344
Pub. Year:
1994
Page(from):
223
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992399 [1558992391]
Language:
English
Call no.:
M23500/344
Type:
Conference Proceedings

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