Real-time stage position measurement with nanometer-scale accuracy

Real-time stage position measurement with nanometer-scale accuracy

Author(s):

Publication title:

Optical Microlithography X

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3051

Pub. Year:

1997

Page(from):

913

Page(to):

921

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819424655 [081942465X]

Language:

English

Call no.:

P63600/3051

Type:

Conference Proceedings

Details

TDL ID:	ZA00016573
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical Microlithography
Conf. info. (Number):	1997 : 10th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1997.03.12-1997.03.14

Similar Items:

1 Conference Proceedings Stage accuracy results using interferometers compensated for refractivity fluctuations Henshaw, P.D., Trepagnier, P.C., Dillon, R.F., Pril, W., Hultermans, B. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Real-time scalable visual analysis on mobile devices A. Pattath, D. S. Ebert, R. A. May, T. F. Collins, W. Pike Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings NANOMETER-SCALE ELECTRONICS AND STORAGE Kelly, K.F., Donhauser, Z.J., Lewis, P.A., Smith, R.K., Weiss, P.S. Kluwer Academic Publishers	8 Conference Proceedings Stepper overlay performance measurements using the air-turbulence-compensated interferometer Henshaw,P.D. SPIE-The International Society for Optical Engineering
3 Conference Proceedings A fluorescent bio-aerosol point detector incorporating excitation, emission, and lifetime data [6377-09] Trepagnier, P. C., Dillon, R. F., Henshaw, P. D., McCampbell, D. P. SPIE - The International Society of Optical Engineering	9 Conference Proceedings Comparison of at-wavelength inspection,printability,and simulation of nanometer-scale substrate defects in extreme ultraviolet lithography(EUVL) Cardinale,G.F., Goldsmith,J.E.M., Ray-Chaudhuri,A.K., Fisher,A., Hector,S.D., Mangat,P.J.S., Masnyj,Z.S., Mancini,D.P., … SPIE - The International Society for Optical Engineering
4 Conference Proceedings Real-time determination and suppression of bio-aerosol constituents [6378-32] Henshaw, P. D., Trepagnier, P. C. SPIE - The International Society of Optical Engineering	10 Conference Proceedings Interferometric length and roughness measurements with nanometer accuracy level Titov,A., Malinovsky,I., Belaidi,H., Franca,R.S., Massone,C.A. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Design and detection of superprecision positioning stage with nanometer resolution Yin,C., Lin,D., Wu,J., Zhang,R. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Spectral fitting applications:improved calibration and radiometric accuracy of EUV/FUV sensors Budzien,S.A., Thonnard,S.E., Drob,D.P., Picone,J.M., Bucsela,E.J., Dymond,K.F. SPIE - The International Society for Optical Engineering
6 Conference Proceedings Necessity of real-time metadata collection Gordon, D.P. SPIE - The International Society of Optical Engineering	12 Conference Proceedings Toward nanometer accuracy laser metrology for phase-referenced interferometry with the VLTI Leveque, S.A., Wilhelm, R., Salvade, Y., Scherler, O., Daendliker, R. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12