Blank Cover Image

Practical method for full-chip optical proximity correction

Author(s):
Publication title:
Optical Microlithography X
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3051
Pub. Year:
1997
Page(from):
790
Page(to):
803
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424655 [081942465X]
Language:
English
Call no.:
P63600/3051
Type:
Conference Proceedings

Similar Items:

Chen,J.F., Laidig,T.L., Wampler,K.E., Caldwell,R.F., Nakagawa,K.H., Liebchen,A.

SPIE - The International Society for Optical Engineering

Nakagawa,K.H., Broeke,D.Van Den, Chen,J.F., Laidig,T.L., Wampler,K.E., Caldwell,R.F.

SPIE - The International Society for Optical Engineering

Hsu, M., Laidig, T.L., Wampler, K.E., Hsu, S.D., Shi, X., Chen, J.F., Van Den Broeke, D.J., Hsieh, F.

SPIE - The International Society of Optical Engineering

Lu,H.H., Hwang,R., Lee,V., Chen,J.F., Laidig,T.L., Wampler,K.E., Caldwell,R.F.

SPIE - The International Society for Optical Engineering

Chen,J.F., Laidig,L., Wampler,K.E., Caldwell,R.F., Naderi,A.R., Van Den Broeke,D.

SPIE-The International Society for Optical Engineering

Van Den Broeke, D.J., Socha, R., Hsu, S.D., Chen, J.F., Laidig, T.L., Corcoran, N., Hollerbach, U., Wampler, K.E., Shi, …

SPIE - The International Society of Optical Engineering

Hsu, M., Laidig, T., Wampler, K. E., Hsu, S., Shi, X., Chen, J. F., Van Den Broeke, D.

SPIE - The International Society of Optical Engineering

Hsu, S.D., Corcoran, N.P., Eurlings, M., Knose, W.T., Laidig, T.L., Wampler, K.E., Roy, S., Shi, X., Hsu, C.M., Chen, …

SPIE-The International Society for Optical Engineering

Socha,R.J., Petersen,J.S., Chen,J.F., Laidig,T.L., Wampler,K.E., Caldwell,R.F.

SPIE - The International Society for Optical Engineering

Roy, S., Chen, J.F., Liebchen, A., Laidig, T.L., Wampler, K.E., Hollerbach, U.

SPIE-The International Society for Optical Engineering

Hsu, S.D., Chen, J.F., Cororan, N., Knose, W.T., Broeke, D.J.V.D., Laidig, T.L., Wampler, K.E., Shi, X., Hsu, C.M., …

SPIE-The International Society for Optical Engineering

Nakagawa,K.H., Chen,J.F., Socha,R.J., Dusa,M.V., Laidig,T.L., Wampler,K.E., Caldwell,R.F., Broeke,D.J.van den

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12