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Line-width variation with different sublayers for 0.25-ヲフm minimum feature size in DUV lithography

Author(s):
Oh,H.-K. ( Hanyang Univ. )
Cho,S.-Y.
Jeong,Y.-U.
Kang,H.-Y.
Lee,G.-S.
An,I.
Park,I.-H.
2 more
Publication title:
Optical Microlithography X
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3051
Pub. Year:
1997
Page(from):
215
Page(to):
224
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424655 [081942465X]
Language:
English
Call no.:
P63600/3051
Type:
Conference Proceedings

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