Blank Cover Image

Multiple-watt ultraviolet power from a diode-pumped solid state laser at 1-kHz repetition rate

Author(s):
Publication title:
Laser Applications in Microelectronic and Optoelectronic Manufacturing II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2991
Pub. Year:
1997
Page(from):
194
Page(to):
200
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424020 [0819424021]
Language:
English
Call no.:
P63600/2991
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings High-average-power Ce:LiCaF laser at 1-KHz repetition rate tunable from 280 nm to 315 nm

Govorkov,S., Wieｦﾂner,A., Genter,P., Stamm,U., Zschocke,W., Schroder,T, Basting,D.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Extremely narrow-bandwidth high-repetition-rate laser for high-NA step-and-scan tools

Kleinschmidt,J., Patzel,R., Heist,P., Stamm,U., Basting,D., Powell,M.W.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Excimer lasers for material ablation cross the 1.5kHz mark

Patzel,R., Stamm,U., Bragin,I., VoB,F., Nikolaus,B.K., Endert,H., Basting,D.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Excimer laser:innovation in industrial material processing

Basting,D., Endert,H., Patzel,R., Nikolaus,B.K.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings High-repetition-rate excimer lasers for DUV Lithography

Stamm,U., Paetzel,R., Bragin,I., Berger,V., Klaft,I., Kleinschmidt,J., Osmanov,R., Schroeder,T., Vogler,K., Zschocke,W., …

SPIE - The International Society for Optical Engineering
9 Conference Proceedings Prospects for very high repetition rate lasers for microlithography

Bragin,I., Berger,V., Patzel,R., Stamm,U., Targsdorf,A., Kleinschmidt,J., Basting,D.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings High-power ultraviolet all-solid-state laser for industrial applications

Mehlmann,C., Schroder,T., Klopp,P., Koch,R., Stamm,U., Basting,D.

SPIE - The International Society for Optical Engineering
10 Conference Proceedings Solid state pulsed high-repetition-rate excimer lasers

Delmdahl, R.F., Nikolaus, B.

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Performance of very high repetition rate ArF lasers

Hueber,J.-M., Besaucele,H., Das,P.P., Eis,R., Ershov,A.I., Fleurov,V.B., Gaidarenko,D., Hofmann,T., Melcher,P.C., …

SPIE - The International Society for Optical Engineering
11 Conference Proceedings High-repetition-rate ultranarrow-bandwidth 193-nm excimer lasers for DUV lithography

Stamm,U., Patzel,R., Bragin,I., Kleinschmidt,J., Lokai,P., Osmanov,R., Schrbder,T., Sprenger,M., Zschocke,W.

SPIE - The International Society for Optical Engineering
6 Conference Proceedings ArF excimer laser for 193-nm lithography

Stamm,U., Patzel,R., Kleinschmidt,J., Vogler,K., Zschocke,W., Bragin,I., Basting,D.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Nova Tube: first excimer laser design for quasi-sealed-off operation

U. Rebhan, B.K. Nikolaus, F. Voß, D. Basting, R. Pätzel

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12