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Laser microprojection for micromechanical device fabrication

Author(s):
Publication title:
International Conference on Experimental Mechanics: Advances and Applications, 4-6 December, 1996, Singapore
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2921
Pub. Year:
1997
Page(from):
684
Page(to):
692
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819423238 [0819423238]
Language:
English
Call no.:
P63600/2921
Type:
Conference Proceedings

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