New array lens optical system for large-area micromachining lithography
- Author(s):
- Wang,L. ( Ultratech Stepper,Inc. )
- Markle,D.A.
- Ellis,R.J.
- Jeong,H.J.
- Publication title:
- Microlithography and Metrology in Micromachining II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2880
- Pub. Year:
- 1996
- Page(from):
- 210
- Page(to):
- 223
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819422781 [0819422789]
- Language:
- English
- Call no.:
- P63600/2880
- Type:
- Conference Proceedings
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