Critical dimension metrology for MEMS processes using electrical techniques
- Author(s):
- Allen,R.A. ( National Institute of Standards and Technology )
- Marshall,J.C.
- Publication title:
- Microlithography and Metrology in Micromachining II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2880
- Pub. Year:
- 1996
- Page(from):
- 152
- Page(to):
- 158
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819422781 [0819422789]
- Language:
- English
- Call no.:
- P63600/2880
- Type:
- Conference Proceedings
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