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New test structures and techniques for measurement of mechanical properties of MEMS materials

Author(s):
Publication title:
Microlithography and Metrology in Micromachining II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2880
Pub. Year:
1996
Page(from):
78
Page(to):
91
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422781 [0819422789]
Language:
English
Call no.:
P63600/2880
Type:
Conference Proceedings

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