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Three-dimensional additive electron beam lithography

Author(s):
Publication title:
Metal/Nonmetal Microsystems: Physics, Technology, and Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2780
Pub. Year:
1996
Page(from):
388
Page(to):
395
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421661 [0819421669]
Language:
English
Call no.:
P63600/2780
Type:
Conference Proceedings

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