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Dry micromachining of high-aspect-ratio Si for microsensors

Author(s):
Pang,S.W. ( Univ.of Michigan )  
Publication title:
Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2639
Pub. Year:
1995
Page(from):
234
Page(to):
243
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420053 [0819420050]
Language:
English
Call no.:
P63600/2639
Type:
Conference Proceedings

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