Chemically enhanced focused-ion-beam(FIB)repair of opaque defects on chrome photomasks
- Author(s):
- Casey,J.D.,Jr. ( Micrion Corp.(USA) )
- Doyle,A.F. ( Micrion Corp.(USA) )
- Stewart,D.K. ( Micrion Corp.(USA) )
- Ferranti,D.C. ( Micrion Corp.(USA) )
- Publication title:
- Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3096
- Pub. Year:
- 1997
- Page(from):
- 322
- Page(to):
- 332
- Pub. info.:
- Bellingham, Washington: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819425164 [0819425168]
- Language:
- English
- Call no.:
- P63600/3096
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Chemically enhanced FIB repair of opaque defects on molybdenum silicide photomasks
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
2
Conference Proceedings
Edge-placement accuracy of opaque and clear defect repairs using focused ion beam technology
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
0.35-ヲフm i-line attenuated phase-shift mask(PSM)repair by focused-ion-beam technology
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Current focused-ion-beam repair strategies for opaque defects and clear defects on advanced phase-shifting masks
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Material removal strategies and results for 193-nm lithography using FIB mask repair
SPIE - The International Society of Optical Engineering |
4
Conference Proceedings
Focused ion beam deposition of new materials: dielectric films for device modification and mask repair, and tantalum films for x-ray mask repair
Society of Photo-optical Instrumentation Engineers |
10
Conference Proceedings
Repair and printability study of binary chrome masks with OPC features for 0.18-ヲフm technology node
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |