Automated method to check sidelobe overlap projected by adjacent apertures in attenuated phase-shift masks
- Author(s):
Nakajo,K. ( Hitachi ULSI Engineering Corp.(Japan) ) Sakemi,J. ( Hitachi ULSI Engineering Corp.(Japan) ) Moniwa,A. ( Hitachi,Ltd.(Japan) ) Terasawa,T. ( Hitachi,Ltd.(Japan) ) Hasegawa,N. ( Hitachi,Ltd.(Japan) ) Tsujimoto,E. ( Hitachi,Ltd.(Japan) ) - Publication title:
- Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3096
- Pub. Year:
- 1997
- Page(from):
- 154
- Page(to):
- 162
- Pub. info.:
- Bellingham, Washington: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819425164 [0819425168]
- Language:
- English
- Call no.:
- P63600/3096
- Type:
- Conference Proceedings
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