Blank Cover Image

Numerical prediction of etched profile in pyrolytic laser etching

Author(s):
  • Wee,T.S. ( National Univ.of Singapore )
  • Lu,Y.F. ( National Univ.of Singapore )
  • Chim,W.K. ( National Univ.of Singapore )
Publication title:
Microelectronic Packaging and Laser Processing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3184
Pub. Year:
1997
Page(from):
211
Page(to):
220
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426116 [0819426113]
Language:
English
Call no.:
P63600/3184
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Nanolithography by tip-enhanced laser irradiation

Mai,Z.H., Lu,Y.F., Song,W.D., Chim,W.K

SPIE - The International Society for Optical Engineering
7 Conference Proceedings Theoretical model and experimental study for dry and steam laser cleaning (Invited Paper)

Lu,Y.F., Song,W.D., Zhang,Y., Low,T.S.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Investigation On Laser-Induced Effects In Nanostructure Fabrication With Laser-Irradiated Scanning Tunneling Microscope Tips In Air Ambient

Mai, Z.H., Lu, Y.F., Song, W.D., Chim, W.K.

Materials Research Society
8 Conference Proceedings Excimer laser irradiation on NiP surface

Liu,D.M., Lu,Y.F., Yiang,K.Y., Song,W.D., Hong,M.H., Low,T.S.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Kinetic study of nanofabrication on gold films by atomic force microscope tips under laser radiation

Hu,B., Lu,Y.F., Mai,Z.H., Song,W.D., Chim,W.K.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Cleaning force in laser cleaning of silicon substrates

Song,W.D., Lu,Y.F., Ye,K.D., Tee,C.K., Hong,M.H., Liu,D.M., Low,T.S.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Laser microbumping and contamination-free tagging on magnetic hard disk surfaces: techniques and applications

Liu,D., Wee,T.S., Yuan,Y., Lu,Y.F., Hong,M.H., Goh,R.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Plasma diagnostics in KrF excimer laser deposition of Ti thin films

Hong,M.H., Lu,Y.F., Ho,T.M., Lu,L.W., Low,T.S.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Fundamental Issues in Rapid Thermal Annealing (RTA), Spike RTA and Excimer Laser Annealing (ELA) for the Formation of Shallow p+/n Junctions

Chong, Y.F., Pey, K.L., Wee, A.T.S., See, A., Tung, C.H., Lu, Y.F.

Electrochemical Society
11 Conference Proceedings KrF excimer laser deposition of titanium thin films on silicon substrates

Lu,L.W., Lu,Y.F., Hong,H., Ho,T.M., Low,T.S.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Laser cleaning of magnetic disks

Song,W.D., Lu,Y.F., Hong,M.H., Low,T.S.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Laser buffing of nickel-phosphorous surface after mechanical texturing

Liu,D.M., Lu,Y.F., Neo,Y.Y., Wang,W.J., Low,T.S.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12