Electroluminescent and photosensitive films prepared by DTC-CVD method
- Author(s):
- Zavyalova,L.V. ( Institute of Semiconductor Physics(Ukraine) )
- Svechnikov,G.S. ( Singapore Polytechnic Univ. )
- Publication title:
- Microelectronic Packaging and Laser Processing
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3184
- Pub. Year:
- 1997
- Page(from):
- 111
- Page(to):
- 117
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426116 [0819426113]
- Language:
- English
- Call no.:
- P63600/3184
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
7
Conference Proceedings
Implementation and benefits of advanced process control for lithography CD and overlay
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Photodetectors of slit and sandwich types based on CdS and CdS1-xSex films obtained using MOCVD method from dithiocarbamates
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Tool ranking using aberration measurements in a high-volume manufacturing facility
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
5
Conference Proceedings
Influence of laser dcposition conditions on optical properties of silicon composite films
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Characteristics of Polycrystalline 3C-SiC Thin Films Grown on AIN Buffer Layer by CVD
Trans Tech Publications |