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Controlled thickness and dielectric constant titanium-doped SiO2 thin films on silicon by sol gel process

Author(s):
Liu,H.L. ( Nanyang Technological Univ.(Singapore) )
Wang,S.S. ( Nanyang Technological Univ.(Singapore) )
Zhou,Y. ( Nanyang Technological Univ.(Singapore) )
Lam,Y.L. ( Nanyang Technological Univ.(Singapore) )
Chan,Y.C. ( Nanyang Technological Univ.(Singapore) )
Kam,C.H. ( Nanyang Technological Univ.(Singapore) )
1 more
Publication title:
Microelectronic Packaging and Laser Processing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3184
Pub. Year:
1997
Page(from):
47
Page(to):
56
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426116 [0819426113]
Language:
English
Call no.:
P63600/3184
Type:
Conference Proceedings

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