Buried double p-n lunction structure using a CMOS process for wavelength detection

Buried double p-n lunction structure using a CMOS process for wavelength detection

Author(s):

Lu,G.N. ( Univ.de Paris VI-Pierre et Marie Curie (France) )

Ben Chouikha,M. ( Univ.de Paris VI-Pierre et Marie Curie (France) )

Sedjil,M. ( Univ.de Paris VI-Pierre et Marie Curie (France) )

Sou,G. ( Univ.de Paris VI-Pierre et Marie Curie (France) )

Alquie,G. ( Univ.de Paris VI-Pierre et Marie Curie (France) )

Rigo,S. ( Univ.de Paris VI-Pierre et Marie Curie (France) )

1 more

Publication title:

Microelectronic Structures and MEMS for Optical Processing III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3226

Pub. Year:

1997

Page(from):

204

Page(to):

213

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426581 [081942658X]

Language:

English

Call no.:

P63600/3226

Type:

Conference Proceedings

Details

TDL ID:	ZA00016459
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Microelectronic Structures and MEMS for Optical Processing
Conf. info. (Number):	1997 : 3rd
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1997.09.29-1997.09.30

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