Construction of a fully functional NSOM using MUMPs technology

Construction of a fully functional NSOM using MUMPs technology

Author(s):

Aksyuk,V. ( Lucent Technologies/Bell Labs. )
Barber,B. ( Lucent Technologies/Bell Labs. )
Gammel,P.L. ( Lucent Technologies/Bell Labs. )
Bishop,D.J. ( Lucent Technologies/Bell Labs. )

Publication title:

Microelectronic Structures and MEMS for Optical Processing III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3226

Pub. Year:

1997

Page(from):

188

Page(to):

194

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426581 [081942658X]

Language:

English

Call no.:

P63600/3226

Type:

Conference Proceedings

Details

TDL ID:	ZA00016459
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Microelectronic Structures and MEMS for Optical Processing
Conf. info. (Number):	1997 : 3rd
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1997.09.29-1997.09.30

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