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Design and development of microstructures for MEMS applications (Invited Paper)

Author(s):
  • Chandra,S. ( Indian Institute of Technology )
  • Singh,J. ( Indian Institute of Technology )
  • Chand,A. ( Indian Institute of Technology )
Publication title:
Microelectronic Structures and MEMS for Optical Processing III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3226
Pub. Year:
1997
Page(from):
22
Page(to):
30
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426581 [081942658X]
Language:
English
Call no.:
P63600/3226
Type:
Conference Proceedings

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