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Edge-placement accuracy of opaque and clear defect repairs using focused ion beam technology

Author(s):
Raphaelian,M.L. ( Micrion Corp. )
Carolan,D. ( Micrion Corp. )
Casey,J.D.,Jr. ( Micrion Corp. )
Doyle,A.F. ( Micrion Corp. )
Ellis,M. ( Micrion Corp. )
Ferranti,D.C. ( Micrion Corp. )
Lessing,J. ( Micrion Corp. )
Rose,K. ( Micrion Corp. )
Stewart,D.K. ( Micrion Corp. )
White,R.L. ( SEMATECH,Intel Corp.,and MIT Lincoln Corp. )
5 more
Publication title:
17th Annual BACUS Symposium on Photomask Technology and Management
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3236
Pub. Year:
1998
Page(from):
471
Page(to):
486
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426697 [0819426695]
Language:
English
Call no.:
P63600/3236
Type:
Conference Proceedings

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