On the way to 1 Gb: demonstration of e-beam proximity effect correction for mask making

On the way to 1 Gb: demonstration of e-beam proximity effect correction for mask making

Author(s):

Rosenbusch,A. ( Sigma-C GmbH (FRG) )
Kalus,C.K. ( Sigma-C GmbH (FRG) )
Endo,H. ( OKI Electric Industry Co.,Ltd. (Japan) )
Kimura,Y. ( OKI Electric Industry Co.,Ltd. (Japan) )
Endo,A. ( OKI Electric Industry Co.,Ltd. (Japan) )

Publication title:

17th Annual BACUS Symposium on Photomask Technology and Management

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3236

Pub. Year:

1998

Page(from):

312

Page(to):

318

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426697 [0819426695]

Language:

English

Call no.:

P63600/3236

Type:

Conference Proceedings

Details

TDL ID:	ZA00016458
Series ID:	PA00000029
Conf. info. (Name):	SPIE Photomask Technology : Annual Symposium on Photomask Technology and Management
Conf. info. (Number):	1997 : 17th
Conf. info. (Venue):	Redwood City, California, USA
Conf. info. (Date):	1997.09.17-1997.09.19

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