Plasma etching of Cr photomasks: optimization of process conditions and CD control
- Author(s):
Constantine,C. ( Plasma-Therm,Inc. ) Johnson,D.J. ( Plasma-Therm,Inc. ) Westerman,R.J. ( Plasma-Therm, ) Coleman,T.P. ( Etec Systems,Inc. ) Faure,T. ( IBM Corp. ) Dubuque,L.F. ( IBM Corp. ) - Publication title:
- 17th Annual BACUS Symposium on Photomask Technology and Management
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3236
- Pub. Year:
- 1998
- Page(from):
- 94
- Page(to):
- 103
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426697 [0819426695]
- Language:
- English
- Call no.:
- P63600/3236
- Type:
- Conference Proceedings
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