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Diagnostics of nitrogen-implanted diamond-like carbon films by optical and microhardness measurements

Author(s):
Artamonov,V.V. ( Institute of Semiconductor Physics (Ukraine) )
Klyui,N.I. ( Institute of Semiconductor Physics (Ukraine) )
Romanykuk,B.N. ( Institute of Semiconductor Physics (Ukraine) )
Valakh,M.Ya. ( Institute of Semiconductor Physics (Ukraine) )
Vasylyk,O.V. ( Institute of Semiconductor Physics (Ukraine) )
Semenovich,V.A. ( Institute for Superhard Materials (Ukraine) )
Perez-Rodriguez,A. ( Univ.de Barcelona (Spain) )
Morante,J.R. ( Univ.de Barcelona (Spain) )
3 more
Publication title:
International Conference on Optical Diagnosis of Materials and Devices for Opto-, Micro-, and Quantum Electronics : 13-15 May 1997, Kiev, Ukraine
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3359
Pub. Year:
1998
Page(from):
339
Page(to):
343
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819428080 [0819428086]
Language:
English
Call no.:
P63600/3359
Type:
Conference Proceedings

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