Optical diagnostics of light-emitting Si clusters in SiO2 formed by ion implantation

Optical diagnostics of light-emitting Si clusters in SiO2 formed by ion implantation

Author(s):

Valakh,M,Ya. ( Institute of Semiconductor Physics (Ukraine) )

Yukhimchuk,V.A. ( Institute of Semiconductor Physics (Ukraine) )

Bratus',V.Ya. ( Institute of Semiconductor Physics (Ukraine) )

Nasarov,A.N. ( Institute of Semiconductor Physics (Ukraine) )

Hemment,P.L.F. ( Univ.of Surrey (UK) )

Komoda,T. ( MEW Ltd. (Japan) )

1 more

Publication title:

International Conference on Optical Diagnosis of Materials and Devices for Opto-, Micro-, and Quantum Electronics : 13-15 May 1997, Kiev, Ukraine

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3359

Pub. Year:

1998

Page(from):

284

Page(to):

288

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819428080 [0819428086]

Language:

English

Call no.:

P63600/3359

Type:

Conference Proceedings

Details

TDL ID:	ZA00016446
Series ID:	PA00000029
Conf. info. (Name):	International Conference on Optical Diagnosis of Materials and Devices for Opto-, Micro-, and Quantum Electronics
Conf. info. (Number):	1997
Conf. info. (Venue):	Kiev, Ukraine
Conf. info. (Date):	1997.05.13-1997.05.15

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