Technological aspects of deep proton lithography for the fabrication of micro-optical elements for photonics in computing applications

Technological aspects of deep proton lithography for the fabrication of micro-optical elements for photonics in computing applications

Author(s):

Tuteleers,P. ( Vrije Univ.Brussel (Belgium) )

Vynck,P. ( Vrije Univ.Brussel (Belgium) )

Ottevaere,H. ( Vrije Univ.Brussel (Belgium) )

Baukens,V. ( Vrije Univ.Brussel (Belgium) )

Verschaffelt,G. ( Vrije Univ.Brussel (Belgium) )

Kufner,S. ( Vrije Univ.Brussel (Belgium) )

Kufner,M. ( Vrije Univ.Brussel (Belgium) )

Hermanne,A. ( Eenheid Cyclotron (Belgium) )

Veretennicoff,I.P. ( Vrije Univ.Brussel (Belgium) )

Thienpont,H. ( Vrije Univ.Brussel (Belgium) )

5 more

Publication title:

Optics in Computing '98

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3490

Pub. Year:

1998

Page(from):

409

Page(to):

411

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429490 [081942949X]

Language:

English

Call no.:

P63600/3490

Type:

Conference Proceedings

Details

TDL ID:	ZA00016439
Series ID:	PA00000029
Conf. info. (Name):	Optics in Computing
Conf. info. (Number):	1998
Conf. info. (Venue):	Brugge, Belgium
Conf. info. (Date):	1998.06.17-1998.06.20

Similar Items:

1 Conference Proceedings Free-space monolithic micro-optical modules: a low-cost route for photonic interconnects to silicon Thienpont,H., Baukens,V., Ottevaere,H., Volckaerts,B., Tuteleers,P., Vynck,P., Vervaeke,M., Debaes,C., Verschaffelt,G., … SPIE-The International Society for Optical Engineering	7 Conference Proceedings Fabrication and packaging tolerances of a free-space micro-optical intra-MCM interconnection module:from raytracing model to experimental evidence Baukens,V., Debaes,C., Vervaecke,M., Ottevaere,H., Tuteleers,P., Vynck,P., Volckaerts,B., Veretennicoff,I.P., … SPIE - The International Society for Optical Engineering
2 Conference Proceedings Replication of refractive micro-optomechanical components made with deep lithography with protons Tuteleers,P., Vynck,P., Ottevaere,H., Debaes,C., Hermanne,A., Veretennicoff,I.P., Thienpont,H. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Plastic micro-optical modules for high-throughput interchip optical interconnections Thienpont,H., Baukens,V., Ottevaere,H., Volckaerts,B., Debaes,C., Vervaeke,M., Tuteleers,P., Vynck,P., Hermanne,A., … SPIE-The International Society for Optical Engineering
3 Conference Proceedings Experimental demonstration of a multichannel micro-optical bridge for multi-gigabit per second free-space intra-MCM interconnects Verschaffelt,G., Brczynski,R., Tuteleers,P., Vynck,P., Baukens,V., Ottevaere,H., Debaes,C., Kufner,S., Kufner,M., … SPIE-The International Society for Optical Engineering	9 Conference Proceedings "Free-space micro-optical intra-MCM interconnection modules: performances, potentialities, and limitations" Baukens,V., Debaes,C., Vervaeke,M., Ottevaere,H., Volckaerts,B., Vynck,P., Tuteleers,P., Hermanne,A., … SPIE-The International Society for Optical Engineering
4 Conference Proceedings Performance simulations of optical multichip-module interconnects: comparing guided-wave and free-space pathways Baukens,V., Verschaffelt,G., Tuteleers,P., Vynck,P., Ottevaere,H., Kufner,M., Veretennicoff,I.P., Bockstaele,R., … SPIE-The International Society for Optical Engineering	10 Conference Proceedings Refractive and diffractive micro-optics in optical interconnects Thienpont,H., Baukens,V., Buczynski,R., Ottevacre,H., Volckaerts,B., Debaes,C., Tuteleers,P., Vynck,P., Hermanne,A., … SPIE - The International Society for Optical Engineering
5 Conference Proceedings Microlens arrays fabricated by deep lithography with protons and their characterization Ottevaere,H., Tuteleers,P., Volckaerts,B., Baukens,V., Lamprecht,J., Schwider,J., Hermanne,A., Naessens,K., … SPIE-The International Society for Optical Engineering	11 Conference Proceedings Deep lithography with protons as an alternative fabrication technology for high-precision 2D fiber connector components Volckaerts, B., Krajewski, R. G., Vynck, P., Ottevaere, H., Watte, J. A., Daems, D., Hermanne, A., Thienpont, H. SPIE - The International Society of Optical Engineering
6 Conference Proceedings Design and optimization of VCSEL-based micro-optical relay systems: bringing optical information to silicon chips Baukens,V., Verschaffelt,G., Ottevaere,H., Veretennicoff,I.P., Thienpont,H. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Basic aspects of deep lithography with particles for the fabrication of micro-optical and micromechanical structures Volckaerts, B., Vynck, P., Vervaeke, M., Cosentino, L., Finocchiaro, P., Reichart, P., Datzmann, G., Hauptner, A., … SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12