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Ultrathin film fully depleted CMOS/SIMOX technology with selective CVD tungsten and its application to LSIs (Invited Paper)

Author(s):
  • Sato,Y. ( NTT System Electronics Labs. (Japan) )
  • Kosugi,T. ( NIT Wireless System Labs. (Japan) )
  • shii,H. ( NTT System Electronics Labs. (Japan) )
Publication title:
Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3506
Pub. Year:
1998
Page(from):
218
Page(to):
229
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429650 [0819429651]
Language:
English
Call no.:
P63600/3506
Type:
Conference Proceedings

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