Manufacturing multilevel metal CMOS with deuterium anneals for improved hot-carrier reliablility
- Author(s):
Kizilyalli,I.C. ( Lucent Technologies/Bell Labs. ) Abein,G. ( Chen,Univ.of Illinois/Urbana-Champaign ) Chen,Z. ( Chen,Univ.of Illinois/Urbana-Champaign ) Weber,G.R. ( Lucent Technologies/Bell Labs. ) Register,F. ( Univ.of Illinoisi Urbana-Champaign ) Harris,E. ( Lucent Technologies/Bell Labs. ) Chetlur,S. ( Lucent Technologies/Bell Labs. ) Higashi,G.S. ( Lucent Technologies/Bell Labs. ) Schofieled,M. ( Lucent Technologies/Bell Labs. ) Sen,S. ( Lucent Technologies/Bell Labs. ) Kotzias,B. ( Lucent Technologies/Bell Labs. ) Roy,P.K. ( Lucent Technologies/Bell Labs. ) Lyding,J.W. ( Univ.of lllinois/Urbana-Champaign ) Hess,K. ( Univ.of lllinois/Urbana-Champaign ) - Publication title:
- Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3506
- Pub. Year:
- 1998
- Page(from):
- 141
- Page(to):
- 146
- Pub. info.:
- Bellingham, Washington: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429650 [0819429651]
- Language:
- English
- Call no.:
- P63600/3506
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Deuterium Sintering of CMOS Technology for Improved Hot Carrier Reliability
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
North-Holland |
3
Conference Proceedings
Effects of high-density plasma processing on MOSFET matching,noise,and hot carrier reliability
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
10
Conference Proceedings
Transient Charging Effects and Its Implications to The Reliablility of High-k Dielectrics
Springer |
Electrochemical Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |