Blank Cover Image

Manufacturing multilevel metal CMOS with deuterium anneals for improved hot-carrier reliablility

Author(s):
Kizilyalli,I.C. ( Lucent Technologies/Bell Labs. )
Abein,G. ( Chen,Univ.of Illinois/Urbana-Champaign )
Chen,Z. ( Chen,Univ.of Illinois/Urbana-Champaign )
Weber,G.R. ( Lucent Technologies/Bell Labs. )
Register,F. ( Univ.of Illinoisi Urbana-Champaign )
Harris,E. ( Lucent Technologies/Bell Labs. )
Chetlur,S. ( Lucent Technologies/Bell Labs. )
Higashi,G.S. ( Lucent Technologies/Bell Labs. )
Schofieled,M. ( Lucent Technologies/Bell Labs. )
Sen,S. ( Lucent Technologies/Bell Labs. )
Kotzias,B. ( Lucent Technologies/Bell Labs. )
Roy,P.K. ( Lucent Technologies/Bell Labs. )
Lyding,J.W. ( Univ.of lllinois/Urbana-Champaign )
Hess,K. ( Univ.of lllinois/Urbana-Champaign )
9 more
Publication title:
Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3506
Pub. Year:
1998
Page(from):
141
Page(to):
146
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429650 [0819429651]
Language:
English
Call no.:
P63600/3506
Type:
Conference Proceedings

Similar Items:

Lee, J., Chen, Z., Hess, K., Lyding, J. W.

MRS - Materials Research Society

Roy,P.K., Chacon,C., Ma,Y., Kizilyalli,I.C., Horner,G.S., Verkuil,R.L., Miller,T.G.

SPIE-The International Society for Optical Engineering

Kizilyalli, I.

Electrochemical Society

Hess, L. D., Eckhardt, G., Kokorowski, S. A., Olson, G. L., Gupta, A., Chi, Y. M>, Valdez, J. B., Ito, C. R., Nakaji, E. …

North-Holland

Sen,S., Harris,E.B., Gregor,R.W., Martin,S., Abdelgadir,M.A., Barba,R.N., Chetlur,S., Steiner,K.

SPIE - The International Society for Optical Engineering

Kapoor, S., Shri, G.S., Sen, P.K.

SPIE-The International Society for Optical Engineering

Kizilyalli, I.C., Roy, P.K.

Electrochemical Society

Lee, B. H, Choi, R, Harris, R, Krishan, S. A, Young, C. D, Sim, J., Bersuker, G

Springer

Lyding, J. W., Lee, J., Cheng, K., Albrecht, P. M., Ruppalt, L. B., Hess, K.

Electrochemical Society

Kizilyalli, I., Radosevich, J.R., Merchant, S., Roy, P.K., McKinley, J., Kuehene, S., Bevk, J., Ashton, R., Singh, R., …

Electrochemical Society

Roy,P.K., Chen,Y., Chetlur,S.

SPIE-The International Society for Optical Engineering

Kizilyalli, Isik C., Bude, Jeff D.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12