Blank Cover Image

Applications of dielectric thin film by electron cyclotron resonance plasma chemical vapor deposition for semiconductor photoelectronic devices

Author(s):
  • Mao,D. ( Institute of Semiconductors (China) )
  • Tan,M. ( Institute of Semiconductors (China) )
  • Chen,L. ( Institute of Semiconductors (China) )
Publication title:
Semiconductor Lasers III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3547
Pub. Year:
1998
Page(from):
315
Page(to):
318
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430083 [0819430080]
Language:
English
Call no.:
P63600/3547
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Characteristics of Silicon Oxy-Nitride Thin Films Deposited by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition

Valade, L., deCaro, D., Casellas, H., Basso-Bert, M., Faulmann, C., Legros, I-P., Gassoux, P., Aries, L.

Electrochemical Society
7 Conference Proceedings Effect of Aging on Stress in Silicon Nitride Films by Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition Technique.

Sah, R.E., Baumann, H., Serries, D., Kiefer, R., Braunstein, J.

Electrochemical Society
2 Conference Proceedings Biased Electron Cyclotron Resonance Chemical-Vapor Deposition of Silicon Dioxide Inter-Metal Dielectric Thin Films

Shufflebotham,P., Weise,M., Pirkle,D., Denison,D.

Trans Tech Publications
8 Conference Proceedings Low-Temperature Low-Stress Silicon Nitride for Optoelectronic Applications Prepared by Electron-Cyclotron Resonance Plasma Chemical Vapor Deposition

Belkouch, S., Landheer, D., Taylor, R., Rajesh, K., Sproule, G. I.

MRS - Materials Research Society
3 Conference Proceedings Diamondlike carbon films synthesized by electron cyclotron resonance chemical vapor deposition

Moran,M.B., Johnson,L.F.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Silicon-Carbon Alloys Synthesized By Electron Cyclotron Resonance Chemical Vapor Deposition

Johnson, L. F., Moran, M. B.

Materials Research Society
4 Conference Proceedings Rapid Thermal Annealing of Amorphous Silicon Thin Films Grown by Electron Cyclotron Resonance Chemical Vapor Deposition

Pei-Yi Lin, Ping-Jung Wu, I-Chen Chen

Materials Research Society
10 Conference Proceedings Carbon-Nitride, Diamond-Like-Carbon and Silicon-Based Films Synthesized by Electron Cyclotron Resonance Chemical Vapor Deposition

Moran, M. B., Johnson, L. F.

MRS - Materials Research Society
5 Conference Proceedings Optical and Compositional Analysis of Annealed SiOx Thin Films Deposited by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition

T. Roschuk, J. Wojcik, R Mascher

Society of Vacuum Coaters
11 Conference Proceedings A Study on the Behavior of Water Absorption of SiOF Thin Films Deposited by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition Method

Kim, S.P., Choi, S.K., Park, Youngsoo, Chung, Ilsub

Materials Research Society
6 Conference Proceedings Growth of Er doped Si films by electron cyclotron resonance plasma enhanced chemical vapor deposition

Rogers, Jim L., Varhue, Walter J., Adams, Edward

MRS - Materials Research Society
12 Conference Proceedings DEPOSITION OF TITANIUM OXIDE FILMS FROM METAL-ORGANIC PRECURSOR BY ELECTRON CYCLOTRON RESONANCE PLASMA-ASSISTED CHEMICAL VAPOR DEPOSITION

Nagahori, Atsushi, Raj, Rishi

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12